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J-GLOBAL ID:200902197872048707   Reference number:97A0148230

Photonic crystals built by three-dimensional additive lithography enable integrated optics of high density.

三次元アディティブリソグラフィーによって作られたフォトニック結晶は高密度の集積光学を可能にする
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Volume: 2849  Page: 248-256  Publication year: 1996 
JST Material Number: D0943A  ISSN: 0277-786X  CODEN: PSISDG  Document type: Proceedings
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Optical integrated circuits,integrated optics  ,  Manufacturing technology of solid-state devices  ,  Applications of electron beams and ion beams 
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