Art
J-GLOBAL ID:200902197969184443   Reference number:00A0831077

Movable Microstructures Made by Two-photon Three-dimensional Microfabrication.

二光子三次元マイクロ製造で作製した可動マイクロ構造物
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Page: 173-178  Publication year: 1999 
JST Material Number: K20000313  ISBN: 0-7803-5790-6  Document type: Proceedings
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices  ,  Biochemical analytical methods  ,  Gears,gear units 
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