Art
J-GLOBAL ID：200902198720391097
Reference number：93A0398530
Special Issue on Nanometer-scale Machining and Processing Technology - From the Viewpoint of Chemical/Physical Reaction on Surfaces. Chemical Phenomena and Its Application in Ultraprecision Processing.
特集 ナノメータスケールの加工技術 加工界面での化学/物理反応に着目して 超精密加工における化学現象とその利用 特集号編集にあたって
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Author (1)：
Material：
Volume：
59
Issue：
4
Page：
539-542
Publication year：
Apr. 1993
JST Material Number：
F0268A
ISSN：
0912-0289
Document type：
Article
Article type：
解説
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
Reference (2)：
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1) 谷ロ紀男 : ナノテクノロジーの基礎と応用, 工業調査会, (1988) 19.
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2) 土肥俊郎 : 無擾乱鏡面の創製原理とメカノケミカルボリシングの加工促進機構, 埼玉大学紀要 [教育学部], 40, 2 (1991) 31.
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