Application of transmission electron microscopes to nanometre-sized fabrication by means of electron beam-induced deposition

SHIMOJO M; MITSUISHI K; TANAKA M; HAN M; FURUYA K

Art

J-GLOBAL ID：200902200782532619 Reference number：04A0316083

Application of transmission electron microscopes to nanometre-sized fabrication by means of electron beam-induced deposition

電子線誘導堆積によるナノメートル規模の作製への透過型電子顕微鏡の応用

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Author (5)： , , , ,
Material：
Volume： 214 Issue： 1 Page： 76-79 Publication year： Apr. 2004
JST Material Number： B0454B ISSN： 0022-2720 Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices , Microscopy determination of structures

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