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Art
J-GLOBAL ID:200902200782532619   Reference number:04A0316083

Application of transmission electron microscopes to nanometre-sized fabrication by means of electron beam-induced deposition

電子線誘導堆積によるナノメートル規模の作製への透過型電子顕微鏡の応用
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Material:
Volume: 214  Issue:Page: 76-79  Publication year: Apr. 2004
JST Material Number: B0454B  ISSN: 0022-2720  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices  ,  Microscopy determination of structures 

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