Art
J-GLOBAL ID：200902201448271797
Reference number：03A0506433
Localized Plasma Processing of Materials Using Atmospheric-Pressure Microplasma Jets
大気圧微小プラズマジェットを用いた材料の局所プラズマ処理
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Author (6)：
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Material：
Volume：
42
Issue：
6B
Page：
4000-4003
Publication year：
Jun. 30, 2003
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (1)：
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Manufacturing technology of solid-state devices
Reference (8)：
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1) D. F. Weston, T. Smekal, D. B. Rhine and J. Blackwell: J. Vac. Sci. Technol. B19 (2001) 2846.
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2) J. Kiihamaki and S. Franssila: J. Vac. Sci. Technol. A17 (1999) 2280.
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3) Th. Arnold, G. Boehm and A. Schindler: J. Vac. Sci. Technol. A19 (2001) 2586.
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4) J. Voigt, B. Reinker, I. W. Rangelow, G. Mariotto, I. Shvets, P. Guethner and H. Loschner: J. Vac. Sci. Technol. B17 (1999) 2764.
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5) V. Kapicka, M. Sicha, M. Klima, Z. Hubicka, J. Tous, A. Brablec, P. Slavicek, J. F. Behnke, M. Tichy and R. Vaculik: Plasma Source Sci. Technol. 8 (1999) 15.
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