Thermal Stability and Tribological Properties of Si-incorporated DLC Films

CHOI Junho; MIYAGAWA Soji; NAKAO Setsuo; IKEYAMA Masami; KIM Jongduk; MIYAGAWA Yoshiko

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J-GLOBAL ID：200902201905920917 Reference number：06A0742177

Thermal Stability and Tribological Properties of Si-incorporated DLC Films

Siを組込んだDLC膜の熱安定性とトライボロジー特性

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Material：
Volume： 31 Issue： 3 Page： 689-692 Publication year： Sep. 2006
JST Material Number： L4468A ISSN： 1382-3469 Document type： Proceedings
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Manufacturing of ceramics and ceramic whiteware , Lubrication in general , Thin films of other inorganic compounds

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S. Miyagawa, S. Nakao, M. Ikeyama and Y. Miyagawa, Surf Coat. Technol., 156, 322-327(2002).

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