Art
J-GLOBAL ID：200902203289529829
Reference number：03A0506440
Low-Cost and High-Performance Micro-Fabrication Method Using Low Numerical-Aperture Optical Projection Lithography on Copper-Clad Plastic Boards
低開口数光投影リソグラフィーによる銅被覆プラスチック基板上への低コスト高性能微細加工法
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Author (3)：
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Material：
Volume：
42
Issue：
6B
Page：
4031-4036
Publication year：
Jun. 30, 2003
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
Reference (8)：
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BECKER, E. W. Microelectron. Eng. 1986, 4, 35
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UENO, H. Trans. IEE Jpn. 2000, 120-E, 339
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HAGA, T. Trans. IEE Jpn. 2000, 120-E, 363
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YOSHIMURA, C. Trans. IEE Jpn. 2001, 121-E, 266
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U. S. Patent 4882245. 1989
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