Art
J-GLOBAL ID：200902203348422464   Reference number：04A0649691

Microfabrication of Piezoelectric MEMS

圧電性MEMS素子の微細加工法
Author (1)：
BABOROWSKI J

About BABOROWSKI J

(Swiss Federal Inst. Technol., Lausanne, CHE)

About Swiss Federal Inst. Technol., Lausanne, CHE


Material：
Journal of Electroceramics  (J Electroceramics)

About Journal of Electroceramics


Volume： 12  Issue： 1/2  Page： 33-51  Publication year： Jan. 2004 
JST Material Number： W1123A  ISSN： 1385-3449  CODEN： JOELFJ  Document type： Article
Article type： 文献レビュー  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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piezoelectrics

About piezoelectrics

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
PZT

About PZT


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JST classification (3)：
JST classification
Category name(code) classified by JST.
Piezoelectricity,pyroelectricity,electret 
(BM05040M)

About Piezoelectricity,pyroelectricity,electret

,  Ceramic coating to nonmetallic materials 
(YC02040K)

About Ceramic coating to nonmetallic materials

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
圧電性

About 圧電性

, 
MEMS

About MEMS

, 
微細加工法

About 微細加工法


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