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J-GLOBAL ID：200902204225501838   Reference number：04A0265955

High Density Plasma Generation by 12-phase AC Voltage Source

12相交流電源を用いた高密度プラズマの生成
Author (1)：
HASHIMOTO YOSHIYUKI

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(神戸高専)

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Material：
プラズマ応用科学  (Applied Plasma Science)

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Volume： 11  Page： 141-144  Publication year： Dec. 2003 
JST Material Number： L4460A  ISSN： 1340-3214  CODEN： POKAFE  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*plasma production

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,...
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pressure dependence

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JST classification (1)：
JST classification
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Plasma production and heating 
(BJ02060E)

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高密度プラズマ

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