Pressure sensor using p-type polycrystalline diamond piezoresistors

YAMAMOTO Akira; NAWACHI Norio; TSUTSUMOTO Takahiro; TERAYAMA Akira

Art

J-GLOBAL ID：200902205132888585 Reference number：05A0542124

Pressure sensor using p-type polycrystalline diamond piezoresistors

p型多結晶ダイヤモンド圧電抵抗器を用いた圧力センサ

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Material：
Volume： 14 Issue： 3/7 Page： 657-660 Publication year： Mar. 2005
JST Material Number： W0498A ISSN： 0925-9635 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Carbon and its compounds , Piezoelectric devices

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