Art
J-GLOBAL ID:200902205298113263   Reference number:03A0080065

CMOS-based chemical microsensors.

CMOSベースの化学マイクロセンサ
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Volume: 128  Issue:Page: 15-28  Publication year: Jan. 2003 
JST Material Number: A0392A  ISSN: 0003-2654  CODEN: ANALAO  Document type: Article
Article type: 文献レビュー  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Analytical instruments  ,  Manufacturing technology of solid-state devices 
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