Art
J-GLOBAL ID：200902205828009039   Reference number：06A0935306

A simple algorithm for the absolute calibration of flatness using a three flat test

三枚合わせ法による平面度絶対校正アルゴリズム
Author (4)：
TAKATSUJI TOSHIYUKI

About TAKATSUJI TOSHIYUKI

(産業技術総合研)

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, 
BITO YOICHI

About BITO YOICHI

(産業技術総合研)

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, 
OSAWA SONKO

About OSAWA SONKO

(産業技術総合研)

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, 
FURUTANI RYOSHU

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(東京電機大 工)

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Material：
精密工学会誌(CD-ROM)  (精密工学会誌論文集)

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Volume： 72  Issue： 11  Page： 1368-1373  Publication year： Nov. 05, 2006 
JST Material Number： F0268B  ISSN： 1348-8716  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*flatness(property)

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,...
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Thesaurus term/Semi thesaurus term
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*三枚合わせ法

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JST classification (2)：
JST classification
Category name(code) classified by JST.
Metrology in general 
(AD01000Q)

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,  Measurement,testing and reliability of solid-state devices 
(NC03040G)

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Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
平面度

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, 
アルゴリズム

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