MOS構造における重イオン照射誘起電流

TAKAHASHI YOSHIHIRO; SHIBATA TOSHIHIKO; MURASE YUJI; ONISHI KAZUYOSHI; HIRAO TOSHIO; KAMIYA TOMIHIRO

Art

J-GLOBAL ID：200902206677855176 Reference number：04A0344558

MOS構造における重イオン照射誘起電流

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Material：
Volume： 51st Issue： 2 Page： 974 Publication year： Mar. 28, 2004
JST Material Number： Y0054A Document type： Proceedings
Article type：短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Metal-insulator-semiconductor structures , Interactions with ions

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