Art
J-GLOBAL ID：200902208089511005   Reference number：03A0785447

Micromachining approach to nano/bio technology

半導体マイクロマシーニング技術のナノ・バイオテクノロジーへの展開
Author (1)：
HASHIGUCHI GEN

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(香川大 工)

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Material：
電子情報通信学会技術研究報告  (IEICE Technical Report (Institute of Electronics, Information and Communication Engineers))

About 電子情報通信学会技術研究報告


Volume： 103  Issue： 335(NLP2003 56-68)  Page： 65-70  Publication year： Sep. 29, 2003 
JST Material Number： S0532B  ISSN： 0913-5685  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
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*micromachining

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

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,  Research methods in genetics 
(EC01020N)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
マイクロマシーニング

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, 
バイオテクノロジー

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, 
展開

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