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J-GLOBAL ID:200902208608261496   Reference number:05A1019123

Development of polishing pad with self generating porosity-Nano-polishing of brittle material using ultra-dispersed diamonds-

ポア自生パッドの開発とそれの研磨加工への応用-超微細ダイヤモンドによるぜい性材料の研磨-
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Volume: 70  Issue: 10  Page: 1281-1285  Publication year: Oct. 05, 2004 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Grinding 
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