Art

J-GLOBAL ID：200902208927626022   Reference number：06A0135102

Nanoscale fabrication in aqueous KOH solution using tribo-nanolithography

トライボナノリソグラフィーを用いたKOH水溶液におけるナノスケール作製

Author (7)： KAWASEGI Noritaka (Graduate School of Sci. and Engineering, Toyama Univ., 3190 Gofuku, Toyama 930-8555, JPN) ,  PARK Jeong Woo (Engineering Res. Center, Pusan National Univ., 30 Jangjeon-dong, Geumjeong-gu, Busan 609-735, KOR) ,  MORITA Noboru (Dep. of Mechanical and Intellectual Systems Engineering, Toyama Univ., 3190 Gofuku, Toyama 930-8555, JPN) ,  YAMADA Shigeru (Dep. of Mechanical and Intellectual Systems Engineering, Toyama Univ., 3190 Gofuku, Toyama 930-8555, JPN) ,  TAKANO Noboru (Dep. of Mechanical and Intellectual Systems Engineering, Toyama Univ., 3190 Gofuku, Toyama 930-8555, JPN) ,  OYAMA Tatsuo (Dep. of Mechanical and Intellectual Systems Engineering, Toyama Univ., 3190 Gofuku, Toyama 930-8555, JPN) ,  ASHIDA Kiwamu (Advanced Manufacturing Res. Inst., National Inst. of Advanced Industrial Sci. and Technol., 1-2-1 Namiki, Tsukuba ...)
Material： Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)
Volume： 23  Issue： 6  Page： 2471-2475  Publication year： Nov. 2005 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： nanostructure ,...
Semi thesaurus term： トライボナノリソグラフィー

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JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (4)： KOH ,  水溶液 ,  ナノスケール ,  作製