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J-GLOBAL ID:200902208966030927   Reference number:06A0004059

研削加工型による石英ガラスのホットエンボス成形

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Volume: 56th  Page: 585-586  Publication year: Nov. 04, 2005 
JST Material Number: F0755C  ISSN: 0919-1933  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices 
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