Art
J-GLOBAL ID：200902209168778730   Reference number：03A0615726

Study on the Dual Frequency Capacitively Coupled Plasmas by the Particle-in-Cell/Monte Carlo Method

パーティクル-イン-セル/モンテカルロ法による2周波数容量結合プラズマの研究
Author (2)：
WAKAYAMA G

About WAKAYAMA G

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
NANBU K

About NANBU K

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN


Material：
IEEE Transactions on Plasma Science  (IEEE Trans Plasma Sci)

About IEEE Transactions on Plasma Science


Volume： 31  Issue： 4,Pt.1  Page： 638-644  Publication year： Aug. 2003 
JST Material Number： D0036B  ISSN： 0093-3813  CODEN： ITPSBD  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*plasma source

About plasma source

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
plasma treatment

About plasma treatment

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Plasma devices 
(BJ02082I)

About Plasma devices

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
パーティクル

About パーティクル

, 
セル

About セル

, 
モンテカルロ法

About モンテカルロ法

, 
2周波数

About 2周波数

, 
容量結合プラズマ

About 容量結合プラズマ

, 
研究

About 研究


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