Art
J-GLOBAL ID：200902209519728182   Reference number：05A0958388

Development of Micro Capacitive Inclination Sensor

マイクロ容量式傾斜センサの開発
Author (4)：
UEDA Hiroyasu

About UEDA Hiroyasu

(TOKAI RIKA CO., LTD., Aichi, JPN)

About TOKAI RIKA CO., LTD., Aichi, JPN

, 
UENO Hiroshi

About UENO Hiroshi

(TOKAI RIKA CO., LTD., Aichi, JPN)

About TOKAI RIKA CO., LTD., Aichi, JPN

, 
ITOIGAWA Koichi

About ITOIGAWA Koichi

(TOKAI RIKA CO., LTD., Aichi, JPN)

About TOKAI RIKA CO., LTD., Aichi, JPN

, 
HATTORI Tadashi

About HATTORI Tadashi

(Univ. Hyogo, Hyogo, JPN)

About Univ. Hyogo, Hyogo, JPN


Material：
Proceedings of the Sensor Symposium on Sensors, Micromachines, and Applied Systems  (Proceedings of the Sensor Symposium)

About Proceedings of the Sensor Symposium on Sensors, Micromachines, and Applied Systems


Volume： 22nd  Page： 207-211  Publication year： Oct. 20, 2005 
JST Material Number： X0768A  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
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*inclinometer

About inclinometer

,...
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JST classification (1)：
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Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (3)：
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マイクロ

About マイクロ

, 
傾斜センサ

About 傾斜センサ

, 
開発

About 開発


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