Art

J-GLOBAL ID：200902209977063254   Reference number：04A0454963

Oxidation Resistance of Cr-N-O Thin Films Prepared by Pulsed Laser Deposition

パルスレーザ蒸着で準備されたCr-N-O薄膜の酸化抵抗

Author (7)： INOUE J (Nagaoka Univ. Technol., Nagaoka) ,  ASAMI H (Nagaoka Univ. Technol., Nagaoka) ,  HIRAI M (Nagaoka Univ. Technol., Nagaoka) ,  SUZUKI T (Nagaoka Univ. Technol., Nagaoka) ,  SUEMATSU H (Nagaoka Univ. Technol., Nagaoka) ,  JIANG W (Nagaoka Univ. Technol., Nagaoka) ,  YATSUI K (Nagaoka Univ. Technol., Nagaoka)
Material： 電気学会論文誌 A  (IEEJ Transactions on Fundamentals and Materials)
Volume： 124  Issue： 6  Page： 496-500  Publication year： Jun. 01, 2004 
JST Material Number： S0808A  ISSN： 0385-4205  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *thin film ,...

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JST classification (2)： Oxide thin films  (BK14050P) ,  Grinding  (QC03000R)

Reference (18)：

• (1) T. Hurkmans, D. B. Lewis, H. Paritong, J. S. Brooks, and W. D. Münz: “Influence of ion bombardment on structure and properties of unbalanced magnetron grown CrN_x coatings”, Surface & Coatings Technol., Vol. 114, pp. 52-59 (1999)
• (2) J.-N. Tu, J.-G. Duh, and S.-Y. Tsai: “Morphology, mechanical properties, and oxidation behavior of reactively sputtered Cr-N films”, Surface & Coatings Technol., Vol. 133, pp. 181-185 (2000)
• (3) T. Ikeda and H. Satoh: “Phase formation and characterization of hard coatings in the Ti-Al-N system prepared by the cathodic arc ion plating method”, Thin Solid Films, Vol. 195, pp. 99-110 (1991)
• (4) H. Saito, M. Hirai, T. Suzuki, H. Suematsu, W. Jiang, and K. Yatsui: “Cr-N-O thin films deposition by pulsed laser ablation using a Cr target in NH₃ atmosphere”, “Pulsed Power and Plasma Applications”, Proc. 2^nd International Symposium on Pulsed Power and Plasma Applications (Chang-Won, Korea, 2001), pp. 190-194 (2001)
• (5) T. Suzuki, H. Saito, M. Hirai, H. Suematsu, W. Jiang, and K. Yatsui: “Preparation of Cr(N, O) thin films by pulsed laser deposition”, Thin Sold Films, Vol. 407, pp. 118-121 (2002)

Terms in the title (4)： パルスレーザ蒸着 ,  Cr ,  薄膜 ,  酸化抵抗