ダイヤモンドライクカーボン(DLC)薄膜のXPS解析

MOTOMITSU KUNIHIKO; TAKABAYASHI SUSUMU; TAKAHAGI TAKAYUKI; OKAMOTO KEISHI; OKAMOTO KEISHI; NAKATANI TATSUYUKI

Art

J-GLOBAL ID：200902210621717053 Reference number：07A0024101

ダイヤモンドライクカーボン(DLC)薄膜のXPS解析

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Material：
Volume： 20th Page： 180-181 Publication year： Nov. 21, 2006
JST Material Number： L1241A Document type： Proceedings
Article type：短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Carbon and its compounds , Thin films of other inorganic compounds , Surface structure of solids in general

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