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J-GLOBAL ID：200902211551067559   Reference number：03A0523545

NO2 sensing characteristics of WO3 thin film microgas sensor

WO3薄膜マイクロガスセンサのNO2の感知特性
Author (4)：
HE X

About HE X

(Inst. Electronics, Chinese Acad. Sci., Beijing, CHN)

About Inst. Electronics, Chinese Acad. Sci., Beijing, CHN

, 
LI J

About LI J

(Inst. Electronics, Chinese Acad. Sci., Beijing, CHN)

About Inst. Electronics, Chinese Acad. Sci., Beijing, CHN

, 
GAO X

About GAO X

(Inst. Electronics, Chinese Acad. Sci., Beijing, CHN)

About Inst. Electronics, Chinese Acad. Sci., Beijing, CHN

, 
WANG L

About WANG L

(Inst. Electronics, Chinese Acad. Sci., Beijing, CHN)

About Inst. Electronics, Chinese Acad. Sci., Beijing, CHN


Material：
Sensors and Actuators. B. Chemical  (Sens Actuators B Chem)

About Sensors and Actuators. B. Chemical


Volume： B93  Issue： 1/3  Page： 463-467  Publication year： Aug. 01, 2003 
JST Material Number： T0967A  ISSN： 0925-4005  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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*gas sensor

About gas sensor

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
energy saving

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,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Analytical instruments 
(CC02020S)

About Analytical instruments

,  Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
薄膜

About 薄膜

, 
マイクロ

About マイクロ

, 
ガスセンサ

About ガスセンサ

, 
NO2

About NO2

, 
感知

About 感知


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