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J-GLOBAL ID:200902211942702674   Reference number:06A0072735

Design Optimization and Implementation of a Microgravity Capacitive HARPSS Accelerometer

微小重力容量型HARPSS加速度計の設計最適化と構築
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Volume:Issue:Page: 39-46  Publication year: Feb. 2006 
JST Material Number: W1318A  ISSN: 1530-437X  CODEN: ISJEAZ  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Measuring methods and instruments of time,speed,acceleration,angular veloc?  ,  Manufacturing technology of solid-state devices 
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