Art
J-GLOBAL ID：200902212041557302   Reference number：06A0065764

Precise Micro Pattern Replication by Hot Embossing

ホットエンボス成形による精細な微細パターンの転写
Author (4)：
IDEI Kazuyoshi

About IDEI Kazuyoshi

(Nakanishi Metal Works Co., Ltd., Osaka, JPN)

About Nakanishi Metal Works Co., Ltd., Osaka, JPN

, 
MEKARU Harutaka

About MEKARU Harutaka

(Univ. Hyogo, Hyogo, JPN)

About Univ. Hyogo, Hyogo, JPN

, 
TAKEDA Hiroaki

About TAKEDA Hiroaki

(IKEX Ind. Co., Ltd., Aichi, JPN)

About IKEX Ind. Co., Ltd., Aichi, JPN

, 
HATTORI Tadashi

About HATTORI Tadashi

(Univ. Hyogo, Hyogo, JPN)

About Univ. Hyogo, Hyogo, JPN


Material：
JSME International Journal. Series A. Solid Mechanics and Material Engineering (Japan Society of Mechanical Engineers)  (JSME International Journal. Series A. Mechanics and Material Engineering)

About JSME International Journal. Series A. Solid Mechanics and Material Engineering (Japan Society of Mechanical Engineers)


Volume： 49  Issue： 1  Page： 69-73  Publication year： Jan. 15, 2006 
JST Material Number： G0026B  ISSN： 1344-7912  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
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*embossing (plastic working)

About embossing (plastic working)

,...
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Thesaurus term/Semi thesaurus term
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LIGAプロセス

About LIGAプロセス

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Reference (5)：
  • BEKER, E. W. Fabrication of Microstructures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming and Plastic Molding. Microelectron Eng. 1986, 4, 35-42
  • HATTORI, T. Application of Synchrotron Radiation to Nano Micro Manufacturing. Welding Society Magazine. 2002, 71, 3, 5-14
  • YAMADA, T. Development of Vacuum Hot Embossing Equipment. Journal of the Society of Plant Engineers Japan. 2002, 91-95
  • YAMADA, T. Design of a New Hot Embossing Equipment for Fabrication of Microstructures. JMSE/AMSE International Conference on Materials and Processing 2002, Proceedings. 2002, 597-600
  • MEKARU, H. A Deep X-ray Lithography in the "NewSUBARU". 2002 International Microprocessors and Nanotechnology Conference, Nov. 6-8. 2002, 108-109
Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
エンボス成形

About エンボス成形

, 
微細パターン

About 微細パターン

, 
転写

About 転写


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