Art
J-GLOBAL ID:200902212734008531   Reference number:09A0284684

スクラッチ試験におけるDLC膜-基材界面の応力状態

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Material:
Volume: 119th  Page: 224-225  Publication year: Mar. 02, 2009 
JST Material Number: Y0050A  ISSN: 0917-2947  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Thin films of other inorganic compounds 
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