Art

J-GLOBAL ID：200902214120291310   Reference number：03A0479582

Development of Removal System of Airborne Molecular Contaminant by Wetted-wall with Counterflow

対向流濡れ壁による分子状汚染物質除去装置の開発

Author (4)： TAMURA HAJIME (テクノ菱和 技開研) ,  EBINE TAKESHI (テクノ菱和 技開研) ,  YONEDA SHUJI (テクノ菱和 技開研) ,  SHINADA YOSHITERU (テクノ菱和 技開研)
Material： エアロゾル研究  (Journal of Aerosol Research)
Volume： 18  Issue： 2  Page： 110-116  Publication year： 2003 
JST Material Number： L0641A  ISSN： 0912-2834  CODEN： EAKEEA  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： *air cleaning ,...

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JST classification (2)： Air purification  (PC02060X) ,  Absorption  (XD02090P)

Reference (11)：

• SAIKI, A. Handoutai Process Kankyo Niokeru Kagaku Osen To Sono Taisaku. 1997, 42-62
• YABUMOTO, N. The Status Quo of Contamination in ULSI Manufacturing. 1999, 365-388
• The Society of Chemical Engineers, Japan. Kagaku Kogaku Binran. 1999, 594-595
• IIJIMA, K. Proceedings of 15th Annual Tech. Meeting on Air Cleaning and Contamination Control, 1997. 1997, 75-78
• WATANABE, T. Proceedings of 16th Annual Tech. Meeting on Air Cleaning and Contamination Control, 1998. 1998, 1-4

Terms in the title (5)： 対向流 ,  濡れ ,  分子状 ,  汚染物質除去装置 ,  開発