Art
J-GLOBAL ID：200902215498630195   Reference number：03A0248189

Precise Periodic Structuring with Femtosecond-laser.

フェムト秒レーザによる微細周期構造の形成
Author (5)：
SAWADA HIROSHI

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(NECマシナリー)

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, 
KAWAHARA KOSUKE

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(NECマシナリー)

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, 
NINOMIYA TAKAFUMI

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(NECマシナリー)

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, 
KUROSAWA KO

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(宮崎大 工)

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, 
YOKOTANI ATSUSHI

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(宮崎大 工)

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Material：
精密工学会誌  (Journal of the Japan Society for Precision Engineering)

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Volume： 69  Issue： 4  Page： 554-558  Publication year： Apr. 05, 2003 
JST Material Number： F0268A  ISSN： 0912-0289  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*pulsed laser irradiation

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Laser irradiation effects and damages 
(BK16040S)

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,  Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (2)：
Terms in the title
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フェムト秒レーザ

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, 
周期構造

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