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J-GLOBAL ID:200902216014069644   Reference number:04A0408237

表面積が増加できるスパッタチタン膜の酸化処理方法の検討

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Volume: 53rd  Page: 199-200  Publication year: May. 14, 2004 
JST Material Number: Y0052A  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Oxide thin films  ,  Solar cell 
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