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J-GLOBAL ID：200902217319109529   Reference number：05A0713122

Electrochemical etching of silicon through anodic porous alumina

陽極多孔性アルミナによるけい素の電気化学エッチング
Author (3)：
ASOH Hidetaka

About ASOH Hidetaka

(Dep. of Applied Chemistry, Kogakuin Univ., 1-24-2 Nishi-shinjuku, Shinjuku-ku, Tokyo 163-8677, JPN)

About Dep. of Applied Chemistry, Kogakuin Univ., 1-24-2 Nishi-shinjuku, Shinjuku-ku, Tokyo 163-8677, JPN

, 
SASAKI Kunimitsu

About SASAKI Kunimitsu

(Dep. of Applied Chemistry, Kogakuin Univ., 1-24-2 Nishi-shinjuku, Shinjuku-ku, Tokyo 163-8677, JPN)

About Dep. of Applied Chemistry, Kogakuin Univ., 1-24-2 Nishi-shinjuku, Shinjuku-ku, Tokyo 163-8677, JPN

, 
ONO Sachiko

About ONO Sachiko

(Dep. of Applied Chemistry, Kogakuin Univ., 1-24-2 Nishi-shinjuku, Shinjuku-ku, Tokyo 163-8677, JPN)

About Dep. of Applied Chemistry, Kogakuin Univ., 1-24-2 Nishi-shinjuku, Shinjuku-ku, Tokyo 163-8677, JPN


Material：
Electrochemistry Communications  (Electrochem Commun)

About Electrochemistry Communications


Volume： 7  Issue： 9  Page： 953-956  Publication year： Sep. 2005 
JST Material Number： W1133A  ISSN： 1388-2481  Document type： Article
Article type： 短報  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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*silicon

About silicon

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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anodic oxidation

About anodic oxidation


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Electrochemical reaction 
(CB07050F)

About Electrochemical reaction

,  Inorganic compounds and elements in general 
(CD01010D)

About Inorganic compounds and elements in general

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
陽極

About 陽極

, 
多孔性

About 多孔性

, 
アルミナ

About アルミナ

, 
けい素

About けい素

, 
電気化学エッチング

About 電気化学エッチング


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