Tensile-Strained Germanium CMOS Integration on Silicon

ZANG H.; ZANG H.; LOH W.Y.; YE J.D.; LO G.Q.; CHO Byung Jin; CHO Byung Jin

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J-GLOBAL ID：200902217613305948 Reference number：07A1229187

Tensile-Strained Germanium CMOS Integration on Silicon

シリコン上の引張り歪ゲルマニウムCMOS集積化

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Material：
Volume： 28 Issue： 12 Page： 1117-1119 Publication year： Dec. 2007
JST Material Number： B0344B ISSN： 0741-3106 CODEN： EDLEDZ Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Semiconductor integrated circuit , Semiconductor-semiconductor contacts without Gr.13-15 element compounds , Measurement,testing and reliability of solid-state devices

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