Art

J-GLOBAL ID：200902217679063040   Reference number：08A0844820

Dedoping phenomenon of iodine-doped a-C:H films

ヨウ素をドーピングしたa-C:H膜の脱ドーピング現象

Author (4)： YAMAZATO M. (Dep. of Electrical and Electronics Engineering, Univ. of the Ryukyus, 1, Senbaru, Nishihara, Okinawa 903-0213, JPN) ,  SAIDA Y. (Dep. of Electrical and Electronics Engineering, Univ. of the Ryukyus, 1, Senbaru, Nishihara, Okinawa 903-0213, JPN) ,  HIGA A. (Dep. of Electrical and Electronics Engineering, Univ. of the Ryukyus, 1, Senbaru, Nishihara, Okinawa 903-0213, JPN) ,  TOGUCHI M. (Dep. of Electrical and Electronics Engineering, Univ. of the Ryukyus, 1, Senbaru, Nishihara, Okinawa 903-0213, JPN)
Material： Diamond and Related Materials  (Diam Relat Mater)
Volume： 17  Issue： 7-10  Page： 1652-1654  Publication year： Jul. 2008 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *DLC film ,  thin film ,  glassy carbon ,  magnetron sputtering ,  doping ,  dopant ,  iodine ,  optical property ,  electrical conductivity ,  additive effect ,  *diamond-like carbon

JST classification (3)： Thin films of other inorganic compounds  (BK14060A) ,  Carbon and its compounds  (YB02060D) ,  Manufacturing of ceramics and ceramic whiteware  (YC03020V)

Terms in the title (3)： ヨウ素 ,  ドーピング ,  現象