Art

J-GLOBAL ID：200902218293174862   Reference number：06A0510039

Effects of positively and negatively pulsed voltages on the microstructure of DLC films prepared by bipolar-type plasma based ion implantation

バイポーラ型プラズマ基のイオン注入により作製したDLC膜の微細組織に及ぼす正および負のパルス電圧の影響

Author (6)： NAKAO Setsuo (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Materials Res. Inst. for Sustainable Dev., 2266-98 ...) ,  CHOI Junho (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Materials Res. Inst. for Sustainable Dev., 2266-98 ...) ,  KIM Jondoku (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Materials Res. Inst. for Sustainable Dev., 2266-98 ...) ,  MIYAGAWA Soji (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Materials Res. Inst. for Sustainable Dev., 2266-98 ...) ,  MIYAGAWA Yoshiko (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Materials Res. Inst. for Sustainable Dev., 2266-98 ...) ,  IKEYAMA Masami (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Materials Res. Inst. for Sustainable Dev., 2266-98 ...)
Material： Diamond and Related Materials  (Diam Relat Mater)
Volume： 15  Issue： 4-8  Page： 884-887  Publication year： Apr. 2006 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： Carbon ,...
Semi thesaurus term： *DLC ,...

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JST classification (2)： Carbon and its compounds  (YB02060D) ,  Crystal structure of nonmetallic elements and its compounds  (BK07010N)

Terms in the title (7)： バイポーラ ,  プラズマ ,  イオン注入 ,  作製 ,  DLC膜 ,  微細組織 ,  パルス電圧