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J-GLOBAL ID：200902218869170590   Reference number：04A0780253

Real time measurement of microscopic surface shape using high speed cameras with continuously scanning interference microscopy

連続走査型干渉顕微鏡を備えた高速度カメラを用いた微視的表面形状の実時間測定
Author (4)：
MONTGOMERY P

About MONTGOMERY P

(Lab. Physique et Application des Semi-conducteurs (PHASE), CNRS, Strasbourg, FRA)

About Lab. Physique et Application des Semi-conducteurs (PHASE), CNRS, Strasbourg, FRA

, 
DRAMAN C

About DRAMAN C

(Ecole Nationale Superieure de Physique de Strasbourg, Illkirch, FRA)

About Ecole Nationale Superieure de Physique de Strasbourg, Illkirch, FRA

, 
UHRING W

About UHRING W

(Lab. Physique et Application des Semi-conducteurs (PHASE), CNRS, Strasbourg, FRA)

About Lab. Physique et Application des Semi-conducteurs (PHASE), CNRS, Strasbourg, FRA

, 
TOMASINI F

About TOMASINI F

(Fast Vision Technol., Vendenheim, FRA)

About Fast Vision Technol., Vendenheim, FRA


Material：
Proceedings of SPIE  (Proceedings. SPIE - The International Society for Optical Engineering)

About Proceedings of SPIE


Volume： 5458  Page： 101-108  Publication year： 2004 
JST Material Number： D0943A  ISSN： 0277-786X  CODEN： PSISDG  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*shape measurement

About shape measurement

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
CMOSカメラ

About CMOSカメラ


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Optical instruments and techniques in general 
(BD07010S)

About Optical instruments and techniques in general

,  Scientific photography 
(ZA04040T)

About Scientific photography

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
走査型

About 走査型

, 
干渉顕微鏡

About 干渉顕微鏡

, 
高速度カメラ

About 高速度カメラ

, 
表面形状

About 表面形状

, 
実時間測定

About 実時間測定


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