Art
J-GLOBAL ID：200902219530742478
Reference number：05A0719763
Deposition of Ru Thin Films from Supercritical Carbon Dioxide Fluids
超臨界二酸化炭素流体からのRu薄膜の堆積
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Author (1)：
Material：
Volume：
44
Issue：
7B
Page：
5799-5802
Publication year：
Jul. 30, 2005
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Metallic thin films
Reference (18)：
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1) E. Kondoh and H. Kato: Microelectron. Eng. 64 (2002) 495.
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2) E. Kondoh: Proc. Advanced Metallization Conf. 2002 (Material Research Society, PA, 2003) p. 463.
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3) E. Kondoh, V. Vezin, K. Shigama, S. Sunada, K. Kubo and T. Ohta: Proc. 2003 IEEE Int. Interconnect Technology Conf., p. 141.
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4) E. Kondoh and K. Shigama: Proc. Advanced Metallization Conf. 2003 (Material Research Society, PA, 2004) p. 583.
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5) E. Kondoh, M. Hishikawa, M. Yanagihara and K. Shigama: Proc. 2004 IEEE Int. Interconnect Technology Conf., p. 33.
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