Art

J-GLOBAL ID：200902219623890426   Reference number：09A1282749

Automatic Measurement with Small Vibration Sensor Using Self-Coupling Effect

自己結合効果を用いた微小振動の自動測定

Author (3)： NAWA YASUHIKO (愛知工業大学) ,  TSUDA NORIO (愛知工業大学) ,  YAMADA JUN (愛知工業大学)
Material： 電気学会論文誌 C  (IEEJ Transactions on Electronics, Information and Systems)
Volume： 129  Issue： 12  Page： 2115-2120 (J-STAGE)  Publication year： 2009 
JST Material Number： S0810A  ISSN： 0385-4221  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： semiconductor process ,  *vibration measurement ,  frequency ,  *automatic measurement ,  *contactless measurement ,  semiconductor laser ,  laser application
Semi thesaurus term： micro vibration ,  oscillation frequency ,  automatic measurement

JST classification (3)： Manufacturing technology of solid-state devices  (NC03030V) ,  Excitation,generation and measurements of vibrations  (BB02030Z) ,  Measuring methods and instruments of force,work load,pressure,friction  (AD05050V)

Reference (8)：

• (1) レーザ計測ハンドブック編集委員会編:「レーザ計測ハンドブック」,(丸善)(1993)
• (2) P. J. Groot, G. M. Gallatin, and S. H. Macomber : “Ranging and velocimetry signal generation in a backscatter-modulated laser diode”, Appl. Opt., Vol. 21, No. 21, pp. 4475-4480 (1988-11)
• (3) L. Krehut, J. Hast, E. Alarousu, and R. Myllyla : “Low cost velocity sensor based on the self-mixing effect in a laser diode”, Opto-Electronics Rev., Vol. 11, No. 4, pp. 313-319 (2003)
• (4) T. Gharbi, A. Courtevill, and A. Chebbour : “Backscatter-modulated laser diode for low-frequency small-amplitude vibration measurement”, Appl. Opt., Vol. 36, pp. 8233-8237 (1997)
• (5) G. Giuliani, S. Donati, and L. Monti : “Self-mixing laser diode vibrometer with wide dynamic range”, Proc. SPIE 4827, pp. 353-362 (2002)

Terms in the title (3)： 自己 ,  微小振動 ,  自動測定