Damage-Free and Short Annealing of Pb(Zr,Ti)O<sub>3</sub> Thick Films Directly Deposited on Stainless Steel Sheet by Aerosol Deposition with CO<sub>2</sub> Laser Radiation

BABA So; AKEDO Jun

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J-GLOBAL ID：200902220978329332 Reference number：05A0585267

Damage-Free and Short Annealing of Pb(Zr,Ti)O₃ Thick Films Directly Deposited on Stainless Steel Sheet by Aerosol Deposition with CO₂ Laser Radiation

CO₂レーザ照射でのエーロゾル堆積によるステンレスシート上に直接堆積されたPb(Zr,Ti)O₃厚膜の損傷のない短時間焼なまし

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Material：
Volume： 88 Issue： 6 Page： 1407-1410 Publication year： Jun. 2005
JST Material Number： C0253A ISSN： 0002-7820 CODEN： JACTAW Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Oxide thin films , Dielectrics in general

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Damage-Free and Short Annealing of Pb(Zr,Ti)O3 Thick Films Directly Deposited on Stainless Steel Sheet by Aerosol Deposition with CO2 Laser Radiation

Damage-Free and Short Annealing of Pb(Zr,Ti)O₃ Thick Films Directly Deposited on Stainless Steel Sheet by Aerosol Deposition with CO₂ Laser Radiation