Art
J-GLOBAL ID:200902221170430113   Reference number:07A0381172

Nano-mechanical properties of BCN/CN/BN multilayer films

BCN/CN/BN多層膜のナノ機械的性質
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Volume: 16  Issue: 4-7  Page: 1441-1444  Publication year: Apr. 2007 
JST Material Number: W0498A  ISSN: 0925-9635  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds 
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