Dimensional Measurement at a Point on the Diffusing Surface by Using Speckle Pattern Interferometry
スペックル光の干渉を用いた拡散面一点変位計測
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Volume:
32
Issue:
8
Page:
538-542
Publication year:
Aug. 15, 2004
JST Material Number:
X0335A
ISSN:
0387-0200
Document type:
Article
Article type:
短報
Country of issue:
Japan (JPN)
Language:
JAPANESE (JA)
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