Art
J-GLOBAL ID：200902221711501663   Reference number：05A0590206

Aging of a fluorinated lubricant on bare and DLC-coated silicon-based MEMS

裸およびDLC被覆けい素基MEMSにおけるふっ素化潤滑剤の経時変化
Author (5)：
EAPEN Kalathil C.

About EAPEN Kalathil C.

(Univ. of Dayton Res. Inst., Dayton, OH 45469-0168, USA)

About Univ. of Dayton Res. Inst., Dayton, OH 45469-0168, USA

, 
PATTON Steven T.

About PATTON Steven T.

(Univ. of Dayton Res. Inst., Dayton, OH 45469-0168, USA)

About Univ. of Dayton Res. Inst., Dayton, OH 45469-0168, USA

, 
SMALLWOOD Steven A.

About SMALLWOOD Steven A.

(Universal Technol. Corp., 1270 N. Fairfield Rd., Dayton, OH 45432-2600, USA)

About Universal Technol. Corp., 1270 N. Fairfield Rd., Dayton, OH 45432-2600, USA

, 
NAINAPARAMPIL Josekutty J.

About NAINAPARAMPIL Josekutty J.

(Universal Technol. Corp., 1270 N. Fairfield Rd., Dayton, OH 45432-2600, USA)

About Universal Technol. Corp., 1270 N. Fairfield Rd., Dayton, OH 45432-2600, USA

, 
ZABINSKI Jeffrey S.

About ZABINSKI Jeffrey S.

(Materials and Manufacturing Directorate, Air Force Res. Lab., Wright-Patterson AFB, OH 45433-7750, USA)

About Materials and Manufacturing Directorate, Air Force Res. Lab., Wright-Patterson AFB, OH 45433-7750, USA


Material：
Surface & Coatings Technology  (Surf Coat Technol)

About Surface & Coatings Technology


Volume： 197  Issue： 2-3  Page： 270-277  Publication year： Jul. 22, 2005 
JST Material Number： D0205C  ISSN： 0257-8972  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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*silicon

About silicon

,...
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Thesaurus term/Semi thesaurus term
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accelerated test

About accelerated test

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Lubrication in general 
(QB02010S)

About Lubrication in general

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
DLC被覆

About DLC被覆

, 
けい素

About けい素

, 
MEMS

About MEMS

, 
ふっ素化

About ふっ素化

, 
潤滑剤

About 潤滑剤

, 
経時変化

About 経時変化


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