Art
J-GLOBAL ID：200902221717699155   Reference number：04A0035420

Fabrication of thin films of ITO by aerosol CVD

エーロゾルCVDによるITO薄膜の作製
Author (3)：
MAKI K

About MAKI K

(Yokohama City Univ., Kanagawa, JPN)

About Yokohama City Univ., Kanagawa, JPN

, 
KOMIYA N

About KOMIYA N

(Yokohama City Univ., Kanagawa, JPN)

About Yokohama City Univ., Kanagawa, JPN

, 
SUZUKI A

About SUZUKI A

(Yokohama City Univ., Kanagawa, JPN)

About Yokohama City Univ., Kanagawa, JPN


Material：
Thin Solid Films

About Thin Solid Films


Volume： 445  Issue： 2  Page： 224-228  Publication year： Dec. 15, 2003 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 短報  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*indium oxide

About indium oxide

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
ITO(solid solution)

About ITO(solid solution)

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

,  Electric conduction in crystalline semiconductors 
(BM03043X)

About Electric conduction in crystalline semiconductors

,  Optical properties of condensed matter in general 
(BM08010A)

About Optical properties of condensed matter in general

Substance index (1)：
Substance index
Chemical Substance indexed to the Article.
Acetylacetone

About Acetylacetone

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
エーロゾル

About エーロゾル

, 
CVD

About CVD

, 
ITO薄膜

About ITO薄膜

, 
作製

About 作製


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