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J-GLOBAL ID：200902222722968411   Reference number：04A0281822

高いキュリー温度を有する強誘電体エピタキシャル薄膜の圧電特性

Author (2)： YOSHIMURA TAKESHI (大阪府大 大学院工学研究科) ,  TROLIER-MCKINSTRY S (Pennsylvania State Univ., PA, USA)
Material： 電気学会論文誌 E  (IEEJ Transactions on Sensors and Micromachines)
Volume： 124  Issue： 4  Page： 117-123  Publication year： Apr. 01, 2004 
JST Material Number： L3098A  ISSN： 1341-8939  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： lead titanate ,...
Semi thesaurus term： Curie point ,...

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JST classification (2)： Piezoelectricity,pyroelectricity,electret  (BM05040M) ,  Manufacturing technology of solid-state devices  (NC03030V)

Reference (16)：

• (1) P. Muralt : “ferroelectric thin films for micro-sensors and actuators: a review”, J. Micromech. Microeng., Vol. 10, 136 (2000)
• (2) P. Muralt : IEEE Trans. “PZT thin films for microsensors and Actuators: Where do we stand ? ”, Ultrason. Ferro. Freq. Control, Vol. 47, 903 (2000)
• (3) J. Kanno, S. Fujii, T. Kamada, and R. Takayama : “Piezoelectric properties of c-axis oriented Pb(Zr, Ti)O₃ thin films”, Appl. Phys. Lett., Vol. 70, 1378 (1997)
• (4) Q. M. Zhang, H. Wang, N. Kim, and L. E. Cross : “Direct evaluation of domain-wall and intrinsic contributions to the dielectric and piezoelectric response and their temperature dependence on lead zirconate-titanate ceramics”, J. Appl. Phys., Vol. 75, 454 (1994)
• (5) S. Trolier-McKinstry, P. Aungkavattna, F. Chi, J. Lacey, J-P Maria, J. F. Shepard Jr., T. Su, and F. Xu : “The impact of domains on the dielectric and electrical properties of ferroelectric thin films”, Mat. Res. Soc. Symp. Proc., 493, 59 (1998)

Terms in the title (5)： キュリー温度 ,  強誘電体 ,  エピタキシャル ,  薄膜 ,  圧電特性