Transfer Function Analysis of the Micro Cantilever Used in Atomic Force Microscopy

RUBIO-SIERRA F. Javier; VAZQUEZ Rafael; STARK Robert W.

Art

J-GLOBAL ID：200902222950769267 Reference number：06A1017437

Transfer Function Analysis of the Micro Cantilever Used in Atomic Force Microscopy

原子間力顕微鏡に使用されるマイクロカンチレバの伝達関数解析

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Material：
Volume： 5 Issue： 6 Page： 692-700 Publication year： Nov. 2006
JST Material Number： W1355A ISSN： 1536-125X CODEN： ITNECU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Design,manufacturing,and components of robots , Microscopy determination of structures , Manufacturing technology of solid-state devices

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