Art

J-GLOBAL ID：200902225936276516   Reference number：07A0163923

Thermochemical process in preparation of ZnO film by TFA-MOD method

TFA-MOD法によるZnO膜作製における熱化学過程

Author (6)： ZOU Youming (Dep. of Materials Sci. and Engineering, Univ. of Sci. and Technol. of China, Hefei, Anhui 230026, CHN) ,  WANG Yuxia (Dep. of Materials Sci. and Engineering, Univ. of Sci. and Technol. of China, Hefei, Anhui 230026, CHN) ,  ZHANG Hongjuan (Dep. of Materials Sci. and Engineering, Univ. of Sci. and Technol. of China, Hefei, Anhui 230026, CHN) ,  CHEN Zheng (Dep. of Materials Sci. and Engineering, Univ. of Sci. and Technol. of China, Hefei, Anhui 230026, CHN) ,  WANG Jianwen (Dep. of Materials Sci. and Engineering, Univ. of Sci. and Technol. of China, Hefei, Anhui 230026, CHN) ,  LI Yun (Dep. of Materials Sci. and Engineering, Univ. of Sci. and Technol. of China, Hefei, Anhui 230026, CHN)
Material： Applied Surface Science  (Appl Surf Sci)
Volume： 253  Issue： 9  Page： 4356-4360  Publication year： Feb. 28, 2007 
JST Material Number： B0707B  ISSN： 0169-4332  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *zinc oxide ,...
Semi thesaurus term： *MOD法

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JST classification (1)： Oxide thin films  (BK14050P)

Substance index (2)： Ethanolamine ,  Trifluoroacetic Acid

Terms in the title (4)： TFA-MOD法 ,  ZnO ,  作製 ,  化学過程