Epitaxial Silicon Oxynitride Layer on a 6H-SiC(0001) Surface

SHIRASAWA Tetsuroh; HAYASHI Kenjiro; MIZUNO Seigi; TANAKA Satoru; NAKATSUJI Kan; KOMORI Fumio; TOCHIHARA Hiroshi

Art

J-GLOBAL ID：200902226451174860 Reference number：07A0502941

Epitaxial Silicon Oxynitride Layer on a 6H-SiC(0001) Surface

6H-SiC(0001)表面上のエピタキシャル窒酸化けい素層

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Material：
Volume： 98 Issue： 13 Page： 136105.1-136105.4 Publication year： Mar. 30, 2007
JST Material Number： H0070A ISSN： 0031-9007 CODEN： PRLTAO Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Oxide thin films

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