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J-GLOBAL ID:200902227464193754   Reference number:04A0097705

Monitoring and control of RF thermal plasma diamond deposition via substrate biasing

基板バイアスによるRF熱プラズマダイヤモンド蒸着の監視と制御
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Volume: 15  Issue:Page: 161-164  Publication year: Jan. 2004 
JST Material Number: C0354C  ISSN: 0957-0233  CODEN: MSTCEP  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Semiconductor thin films 
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