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J-GLOBAL ID:200902228571103551   Reference number:04A0914720

マイクロ光造形法で作製した3次元微小構造のヤング率の測定 第三報

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Issue: 4-2  Page: 152-154  Publication year: Jul. 22, 2004 
JST Material Number: X0733B  ISSN: 1346-4922  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices 
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