Art

J-GLOBAL ID：200902228929836440   Reference number：05A0995062

Reliability of parameters of associated base straight line in step height samples: Uncertainty evaluation in step height measurements using nanometrological AFM

ステップ高さ試料における基礎直線に関連するパラメータの信頼性:ナノメータ計測AFMを用いたステップ高さ測定における不確実性評価

Author (9)： MISUMI Ichiko (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol. (NMIJ/AIST), Tsukuba ...) ,  GONDA Satoshi (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol. (NMIJ/AIST), Tsukuba ...) ,  KUROSAWA Tomizo (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol. (NMIJ/AIST), Tsukuba ...) ,  AZUMA Yasushi (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol. (NMIJ/AIST), Tsukuba ...) ,  FUJIMOTO Toshiyuki (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol. (NMIJ/AIST), Tsukuba ...) ,  KOJIMA Isao (National Metrology Inst. of Japan, National Inst. of Advanced Industrial Sci. and Technol. (NMIJ/AIST), Tsukuba ...) ,  SAKURAI Toshihisa (Tohoku Univ., Aza-Aoba 10, Aramaki, Aoba-ku, Sendai 980-8579, JPN) ,  OHMI Tadahiro (Tohoku Univ., Aza-Aoba 10, Aramaki, Aoba-ku, Sendai 980-8579, JPN) ,  TAKAMASU Kiyoshi (The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8654, JPN)
Material： Precision Engineering  (Precis Eng)
Volume： 30  Issue： 1  Page： 13-22  Publication year： Jan. 2006 
JST Material Number： A0734B  ISSN： 0141-6359  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *height ,...

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JST classification (1)： Measuring methods and instruments of length,area,cross section,volume,angle  (AD05020O)

Reference (23)：

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• HATSUZAWA, T. A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEMs. Rev Sci Instrum. 1994, 65, 2510-2513
• DOI, T. Accurate surface profilometry using interferometric microscope with high magnification. Proceedings of the 3rd Euspen International Conference, May 26th-30th. 2002. 2002, 521-524

Terms in the title (10)： 高さ ,  試料 ,  基礎 ,  直線 ,  パラメータ ,  ナノメータ ,  計測 ,  AFM ,  高さ測定 ,  不確実性評価