Art

J-GLOBAL ID：200902231252573848   Reference number：06A0500310

Piezoelectric Response to Pressure of Aluminum Nitride Thin Films Prepared on Nickel-Based Superalloy Diaphragms

ニッケルを用いた超合金ダイヤフラム上に作製した窒化アルミニウム薄膜の圧力へのピエゾ電気応答

Author (7)： OHSHIMA Ichiro (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Saga, JPN) ,  AKIYAMA Morito (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Saga, JPN) ,  KAKAMI Akira (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Saga, JPN) ,  TABARU Tatsuo (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Saga, JPN) ,  KAMOHARA Toshihiro (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Saga, JPN) ,  OOISHI Yasunobu (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Saga, JPN) ,  NOMA Hiroaki (National Inst. of Advanced Industrial Sci. and Technol. (AIST), Saga, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 45  Issue： 6A  Page： 5169-5173  Publication year： Jun. 15, 2006 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *piezoelectrics ,...
Semi thesaurus term： *pressure dependence

   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=06A0500310&from=J-GLOBAL&jstjournalNo=G0520B") }}

JST classification (1)： Piezoelectricity,pyroelectricity,electret  (BM05040M)

Reference (20)：

• S. Uda, S. Q. Wang, N. Konishi, H. Inaba and J. Harada: J. Cryst. Growth 275(2005)251.
• R. C. Turner, P. A. Fuierer, R. E. Newnham and T. R. Shrout: Appl. Acoust.41(1994)299.
• G. A. Slack and T. F. McNelly: J. Cryst. Growth 34(1976)263.
• T. Matsumura and Y. Tanabe: J. Phys. Soc. Jpn.15(1960)203.
• T. Shiosaki, M. Adachi and A. Kawabata: Thin Solid Films 96(1982)129.

Terms in the title (8)： ニッケル ,  超合金 ,  ダイヤフラム ,  作製 ,  窒化アルミニウム ,  薄膜 ,  ピエゾ電気 ,  応答