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J-GLOBAL ID:200902231832757636   Reference number:06A0604727

The characteristics of laser micro drilling using a Bessel beam

Besselビームを用いたレーザマイクロドリリングの特性
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Volume: 84  Issue:Page: 423-430  Publication year: Sep. 2006 
JST Material Number: D0256C  ISSN: 0947-8396  CODEN: APHYCC  Document type: Article
Article type: 原著論文  Country of issue: Germany, Federal Republic of (DEU)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices  ,  Applications of lasers 
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