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J-GLOBAL ID:200902232521405449   Reference number:06A0405359

Performance results of MEMS coated with a conformal DLC

コンフォーマルDLCによって被覆されたMEMSの性能結果
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Volume: 260  Issue: 11-12  Page: 1179-1189  Publication year: Jun. 30, 2006 
JST Material Number: E0377A  ISSN: 0043-1648  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Mechanical properties of solids in general  ,  Measurement,testing and reliability of solid-state devices 
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