Art
J-GLOBAL ID：200902232521405449   Reference number：06A0405359

Performance results of MEMS coated with a conformal DLC

コンフォーマルDLCによって被覆されたMEMSの性能結果
Author (4)：
SMALLWOOD Steven A.

About SMALLWOOD Steven A.

(Universal Technol. Corp., Dayton, OH 45432-2600, USA)

About Universal Technol. Corp., Dayton, OH 45432-2600, USA

, 
EAPEN Kalathil C.

About EAPEN Kalathil C.

(Univ. of Dayton Res. Inst., Dayton, OH 45469-0168, USA)

About Univ. of Dayton Res. Inst., Dayton, OH 45469-0168, USA

, 
PATTON Steven T.

About PATTON Steven T.

(Univ. of Dayton Res. Inst., Dayton, OH 45469-0168, USA)

About Univ. of Dayton Res. Inst., Dayton, OH 45469-0168, USA

, 
ZABINSKI Jeffrey S.

About ZABINSKI Jeffrey S.

(Air Force Res. Lab. (AFRL/MLBT), Bldg. 654, 2941 Hobson Way, Rm. 136, Wright Patterson Air Force Base, OH 45433-7750 ...)

About Air Force Res. Lab. (AFRL/MLBT), Bldg. 654, 2941 Hobson Way, Rm. 136, Wright Patterson Air Force Base, OH 45433-7750 ...


Material：
Wear

About Wear


Volume： 260  Issue： 11-12  Page： 1179-1189  Publication year： Jun. 30, 2006 
JST Material Number： E0377A  ISSN： 0043-1648  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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*covering

About covering

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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DLC【炭素】

About DLC【炭素】


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Mechanical properties of solids in general 
(BL01021C)

About Mechanical properties of solids in general

,  Measurement,testing and reliability of solid-state devices 
(NC03040G)

About Measurement,testing and reliability of solid-state devices

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
DLC

About DLC

, 
MEMS

About MEMS


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